采用微波等离子体化学汽相淀积法，以C60膜为过渡层，在光滑的单晶Si衬底(100)表面和研磨的石英衬底表面等光学衬底上，首次在无衬底负偏......

Hot-filament chemical vapor deposition (HFCVD) is a promising method for commercial production of diamond films.Filament......